Study on Laser Triangulation Measurement Principle of Three Dimensional Surface Roughness

摘要

The basic principle of three-dimensional surface roughness laser triangulation has been analyzed in this paper, Light-path diagram and optical geometric relationship of direct-type and symmetric oblique-type triangulation measurement is studied, the mathematical model of Surface micro-height information analysis is given. Resolution of direct-type and symmetric oblique-type triangulation measurement is compared both qualitatively and quantitatively. At last, the Application of laser triangulation method in Three-dimensional surface roughness measurement is analyzed.