We present an innovative approach for the integrated power supply of electronic components such like sensors, actuators or complete micro-systems. The power supply is based on a chip integrated CMOS compatible fuel cell and can be used in variants as non-rechargeable disposable or as rechargeable accumulator fuel cells. The common advantage of both set-ups is the whole integration of the cells into the CMOS production process. The special design of the fuel cells includes the hydrogen storage material incorporated into the electrodes of the micro energy systems and avoids auxiliary components that are necessary for the set-up of conventional fuel cells. Tubes and pressure reducers to conduct hydrogen to the cells and micro-structured flowfields to distribute the fuel at the membrane electrode assemblies can be also omitted. The chip integrated fuel cell accumulator enhances the fuel cell by adding a device that produces hydrogen by electrolysis. Integrating an energy harvesting device like a solar cell into this rechargeable micro energy system the hydrogen storage can be automatically recharged multiple times. Therefore the fuel cell accumulator has the potential of being the key component for the set-up of an energy self sufficient micro system.
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