Far-UV Solid-state Lasers for Semiconductor Processing

摘要

The wavelength region between 190 and 200 nm is especially relevant to semiconductor manufacturing. In contrast to ArF excimer lasers, frequency up-converted solid-state lasers offer tuning, coherence and beam quality characteristics that are essential to high performance semiconductor processing. This paper reviews various methodologies for implementing pulsed non-linear optical interactions in this wavelength region given a wide range of laser operating formats and describes the utilization of these sources for the specific semiconductor applications of interference lithography and photoresist materials studies.