It has always been difficult to process a metal film with high reflectivity in the field of manufacture, industry, medicine,and military, etc. Since much of the laser energy can be reflected especially when the reflectance of the target filmsurface is high, it is hard to process such a metallic film by laser radiation as the energy absorbed by the film material isvery little. In this paper, we used a nanosecond pulsed laser to scribe some patterns on a smooth titanium (Ti) film, andinvestigated the surface morphology of a Ti film ablated by different laser spot sizes and laser energy. In our experiments,it has been found that the Ti film can be efficiently processed although the surface reflectance of the Ti film is about 57%at the wavelength of 532 nm. We also see that the processing range of the Ti film will decrease when the diameter of alaser beam increases. The experimental results show that the ablated status of the surface of a Ti film for a just-focusbeam is much better than that for a defocus beam under the same laser power. Furthermore, the higher the laser power,the larger the processed area. By using the optimal parameters we obtained, we also produced some hole matrices andline patterns on a glass-based Ti film by employing a short pulsed laser. The processed samples were observed with areflecting microscope and a transmitting microscope, respectively. Our research results can play an important role in theselection of laser parameters for laser processing of some materials with a high reflectivity.
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