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Off-axis catadioptric partial compensator design for interferometric measurement of optical freeform surface

机译:无轴射频偏补物设计用于光学自由形状表面的干涉测量

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Optical freeform surfaces have been widely used in optical systems owing to their design degrees of freedom, which cansimplify the structure and improve the performance of optical systems. High accuracy testing for freeform surface isneeded due to the improvement of machining accuracy. However, it is still a challenge to achieve high measuringaccuracy because freeform surfaces lack rotational symmetry. In this paper, an off-axis catadioptric partial compensator(OACPC) design for non-null interferometric method is proposed to measure freeform surface. The design of OACPCconsists of two parts: constructing initial structure and optimizing. The initial structure is obtained by the vectoraberration theory and PW method. Based on the initial structure, the OACPC is generated by modelling and optimizingin the optical design software. In order to verify the feasibility, universality and effectiveness, a design example is given.Theoretical analysis and simulation results demonstrate that the design can realize the measurement of freeform surfaces.
机译:由于它们的设计自由度,光学自由形状表面已广泛用于光学系统中,可以简化结构并提高光学系统的性能。对自由形状表面的高精度测试是由于加工精度的提高而需要。然而,实现高测量仍然是一项挑战准确性,因为自由形状缺乏旋转对称性。本文采用轴外辐射偏差器(OACPC)建议为非空干涉测量方法设计测量自由形状表面。 OACPC的设计由两部分组成:构建初始结构和优化。初始结构由载体获得像差理论和PW方法。基于初始结构,通过建模和优化生成OACPC在光学设计软件中。为了验证可行性,普遍性和有效性,给出了设计示例。理论分析和仿真结果表明,设计可以实现自由形状表面的测量。

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