Research on the Influence of Electron Beam Parameters on Molten Pool Morphologies during Electron Beam Melting Silicon

摘要

Electron beam melting is an effective method to remove volatile impurities in silicon, during which impurities such as P, Al and Ca etc. can be removed to less than 0.3×10~(-4)wt.%. However, so far there is few research on the influence of electron beam parameters, such as beam density and beam size, on molten pool morphology, hence electron beam melting process has not been completely understood, which leads to low energy utilization. In this paper, on the basis of beam size calibration, the influence of beam density and beam size on molten pool morphology is investigated and the concept of melting angle is proposed to characterize molten pool morphology. At the same lime, the optimal molten pool morphology for impurities removal and the corresponding electron beam parameters are also analyzed.