CNT-BCB composites as a bonding interface material for 3D integration

摘要

Thermal management is one of the critical challenges in three-dimensional (3D) integration. This paper reports an approach to increasing the thermal conductivity of the bonding adhesive Benzocyclobutene (BCB) by loading carbon nanotubes (CNTs). By exploiting the aromatic property of BCB, an ultrasonication and mechanical stirring assisted non-covalent dispersion method is developed to disseminate CNTs with different concentrations ranging from 0.25% to 2% into BCB. The experimental results show a 70% improvement in the thermal conductivity by loading CNTs. The bonding strength of BCB-CNT composites were increased by CNTs.