A Simple Method for Estimating the Amount of Feedwater Required to Operate a Semiconductor Process Tool - (PPT)

摘要

This calculator helps quantify the potential savings of design choices, but ultimately, the user makes the decisions. - Example: If the power requirements of a typical tool (100 kW) can be reduced by 5%, the water requirements are also reduced by 5%, or by approximately 24,000 gal/yr.; Tool-level reductions can be accomplished by: - Reducing direct water use (UPW and feedwater); - Reducing component energy consumption; - Reducing utility consumption during idle periods, and - Optimizing process recipes. Additional fab-level savings can result from: - Improving UPW treatment yields; - Recycling waste water for use in UPW treatment, and - Reclaiming waste water for use in cooling water systems.