Multichannel measuring system based on strain, pressure and temperature sensors on the basis of silicon-on-insulator (SOI) structures and Si1−xGex whiskers has been made. Schematic diagram for their ETHERNET network integration using programmed hardware solutions has been proposed.
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机译:基于应变,压力和温度传感器的多通道测量系统基于绝缘体(SOI)结构和SI 1-X / INM> GE X INF>晶须。已经提出了使用编程硬件解决方案的以太网集成的示意图。
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