Construction and Design of Split Flow Molecular Vacuum Pump Fit to Pumping in Differential Inlet Pressure

摘要

Molecular pump is a high-vacuum pumps that have a great demand both at home and abroad. Small power consumption(under the same conditions of pumping speed, power is only a few one-tenth of the diffusion pump), simple and convenient operation, clean and easy maintenance are its feature. With the rapid development of semiconductor industry, film industry and the scientific research, vacuum pump manufacturers gradually pay attention to the molecular pump. Its technical inputs, capital inputs and attention are unprecedented. Molecular pump develops quite fast, which is set up a complete series based on pumping speed from small to large. According to the structure and the different applications, people research and develop the turbo molecular pump, low-molecular pump, air-cooled pump, corrosion-resistant pump, etc. In order to meet the requirements of the experimental apparatus and to reduce the input of the vacuum exhaust equipment, splitflow molecular pump can achieve differential pumping is developed. This kind of molecular pump usually has 2～3 air suction ports, the pressure of each port is different, which can be several orders of magnitude difference, so that the needs of a number of pumps to complete the work can be completed by one vacuum pump. This pump improves the efficiency of the exhaust and reduce the cost This article will discuss the structure and design methods of splitflow molecular pump. In addition, we carry out finite element analysis to the mechanical structure.