FABRICATION OF PLANAR MICRO-ELECTRODE ARRAYS AS A CELL-BASED BIOSENSOR

摘要

Micro-electrode Arrays (MEA) has emerged as a leading technology for extracellular electrophysiological investigations of neuronal networks. This paper introduces the fabrication of planar MEA on the quartz and its application in electrophysiological studies on living cells. The MEA have 8×8 planar microelectrodes, which are covered with a non-toxic, biocompatitable passivation layer, and are further photo-etched by the standard process to expose the microelectrodes and the terminals. The impedance of electrodes is reduced by electroplating with platinum black. It is proved via PC12 cell culturing that the MEA is biocompatible for coupling the extracellular signal as a cell based biosensor, and the system is fit for action potential recording.