Characterization of ZnO Thin Films Grown on c-Sapphire byPulsed Laser Deposition as Templates for Regrowth of ZnO byMetal Organic Chemical Vapor Deposition

摘要

The use of ZnO template layers grown Pulsed Laser Deposition (PLD) has been seen to produce dramatic improvements in the surface morphology, crystallographic quality and optical properties of ZnO layers grown on c-sapphire substrates by Metal Organic Chemical Vapor Deposition. This paper provides complementary details on the PLD-grown ZnO template properties.