Initial Results of a Full Kinetic Simulation of RF H~- Source Including Coulomb Collision Process

摘要

In order to evaluate Electron Energy Distribution Function (EEDF) more correctly for radio frequency inductively coupled plasma (RF-ICP) in hydrogen negative ion sources, the Electromagnetic Particle-In-Cell (EM-PIC) simulation code has been improved by taking into account electron-electron Coulomb collision. Binary collision model is employed to model Coulomb collision process and we have successfully modeled it. The preliminary calculation including Coulomb collision has been done and it is shown that Coulomb collision doesn't have significant effects under the condition: electron density n_e ～ 10~(18) m~(-3) and high gas pressure p_(H_2) = 3 Pa, while it is necessary to include Coulomb collision under high electron density and low gas pressure conditions.