This paper presents a new fabrication process for producing magnetic mi-crocomponents. The process is based on micro powder injection moulding technol-ogy, while the micro moulds are produced using microelectromechanical systems (MEMS) technology. The process involves (1) fabrication of polydimethylsiloxane (PDMS) micro moulds from SU-8 masters, which are produced using UV photo-lithography process; (2) mould filling with magnetic powder and demoulding; and (3) sintering of moulded components in vacuum. The proposed process has been used to sinter Nd-Fe-B microcomponents successfully without using binder system. This research proposes a new approach to fabricate 3-D magnetic microcomponents to meet the needs in applications where magnetic field required.
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