Direct measurement of the linewidth of relief element on AFM in nanometer range

摘要

The article includes the results of the study of image formation in atomic force microscope (AFM). The influence of radius and angle characteristics of cantilever tip as well as the relief of the surface studied on the signal waveform is shown. The authors demonstrate the techniques of AFM calibration and direct measurement of linear sizes of trapezoid structures including the line width with the use of AFM signal and its first derivative. There were obtained the equations establishing relations the sizes of trapezoid structures with the sizes of test segments chosen on AFM signals.