The role of plasmon-polaritons and waveguide modes in surface modification of semiconductors by ultrashort laser pulses

摘要

Polarization-dependent ripples were formed at silicon surfaces under femtosecond laser irradiation. Proposed theoretical model describes changes in optical response of semiconductor surface, induced by generation of nonequilibrium electron-hole plasma, and explains mechanism of surface polaritons and waveguide modes exciatation during femtosecond laser pulse action.