Fabrication and Characterization of TiO2 Porous Thin Film by Spray Deposition

摘要

The titanium dioxide (TiO2) porous films were fabricated by spray deposition system with various operation conditions. Titanium isopropoxide (TTIP), a precursor of TiO2, was prepared in acidic water and polystyrene (PS) beads with various diameters from 50nm to 300nm were added into the acidic solution as the template for porous films. Calcination of the films at 500°C led to removal of PS beads and the formation of crystalline and porous TiO2 films. X-ray diffraction (XRD) and scanning electron microscopy (SEM) were employed to characterize the phase and structure of the film. UV/vis spectrophotometer was employed to measure photoactivity of the film.