New Approach of ZnO Nanowires Grown on ZnO Microball using Gas Blocker in Catalytic Thermal Chemical Vapor Deposition

摘要

This paper will discuss in detail the new approach of Zinc oxide (ZnO) nanowires grown on ZnO microball using gas blocker in catalytic thermal Chemical Vapor Deposition (CVD). Gold was used as a catalyst and fixed to 6 nm thick while the gas flow was fixed to 1.25 L/min. The gas blocker was placed beside the glass substrate at the end of horizontal tube in catalytic thermal CVD to obstruct the gas flow. The physical properties were characterized using Scanning Electron Microscope (SEM), X-ray Diffractometer (XRD) and Atomic Force Microscopy (AFM). Result indicated by SEM confirmed that ZnO nanowires with high intensity were successfully grown on ZnO microball. The result from XRD shows that ZnO nanowires grown on ZnO microball are highly crystalline. The AFM topography also proves that the microball was grown on the glass substrate assisted by gold catalyst.