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Ohmic Contact To Amorphous Carbon Thin Films

机译:欧姆接触非晶碳薄膜

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Amorphous carbon (a-C) thin films have been deposited on silicon substrates at different deposition temperatures ranging from 700°C - 800°C. The objective of this work is to investigate several electrical contacts on a-C thin films and to find the suitable method to fabricate ohmic contact on a-C thin films that prepared from a natural product, camphor (C_(10)H_(16)O). The a-C thin films were prepared with a simple thermal CVD method. In this study, Aurum (Au) and Platinum (Pt) were selected as the metal contact to a-C thin films. I-V characteristics measurement was carried out to study the contact between metal and a-C thin films. It was found that increasing deposition temperature also contributes to the variation I-V characteristics of a-C thin films.
机译:无定形碳(A-C)薄膜已经在不同沉积温度范围内沉积在700℃-800℃的不同沉积温度上。这项工作的目的是研究A-C薄膜上的几个电触点,并找到合适的方法,用于制造由天然产物,樟脑(C_(10)H_(16)O)制备的A-C薄膜上的欧姆接触的欧姆接触。用简单的热CVD方法制备A-C薄膜。在该研究中,选择宫(Au)和铂(Pt)作为与A-C薄膜的金属接触。进行I-V特性测量,以研究金属和A-C薄膜之间的接触。发现增加沉积温度也有助于A-C薄膜的变异I-V特性。

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