A 20 nm Movable Micro Vehicle

摘要

This paper presents design, fabrication, and characterization of an extremely small (20 x 14 um) movable silicon 3D micro vehicle The micro vehicle was fabricated using a combination of focused-ion-beam (FIB) processes for micro/nano parts production, atomic layer deposition (ALD) for friction reduction coating, and a nano manipulator for semi-automated manipulation/assembly of micro/nano parts A micromachined magnet was used as the frame for the micro vehicle and repeated motion of the vehicle using magnetic force was demonstrated. To the author's knowledge, this is the smallest movable micro vehicle ever been reported.