Fabrication of interdigitated nanogap devices for biomolecular detection

摘要

Interdigitated nanogap devices (INDs) were fabricated by the combination of conventional photo/e-beam lithographic techniques and surface-catalyzed chemical deposition (SCD) process. Lithographically-defined gap distances of initial devices were reduced to designed values by simply dipping the devices into the aqueous solution of gold ions and a mild reducing agent, The gross yield of the SCD process was found to be over 50%, The gap distances were controlled by the number of repetition of the SCD process. The INDs that include the minimum 20 nm gap distances, which are hard to form by using conventional lithographic techniques, could be successfully fabricated by using the gap narrowing processes. We also confirmed that the devices could be used for the detection of biomolecules by monotoring the jump of electrical conductance induced by the probe-labeled Au nanopaticles introduced into the gap region To detect the target biomaterials at low concentrations, the design of INDs was selected as a shape of interdigitated electrodes presenting large active area We believe that the INDs would be one of the promising platfoims useful in the detection of biomolecules.