High-resolution interferometry with Nd:YAG laser for local probemicroscopy

摘要

We present a system of positioning a sample for various types of local probe microscopes with interferometricmeasurement of displacement. The positioning extends significantly the field of view of the local probe microscopywhere not only the probe can be displaced over a small range by piezoelectric transducers but the sample can bepositioned over a larger scale. The stage allows positioning with nanometer resolution in all three axes under a closedloop control with position detection via capacitive sensors. Interferometric system monitoring all six degrees of freedomof the stage ensures full metrological traceability of the positioning to the fundamental etalon of length and improvesresolution and overall precision of the displacement monitoring.