Preconcentrator-based sensor p-system for low-level benzenedetectione

摘要

In this paper, a preconcentrator-based sensor μ-system for low level benzene detection is presented. It consists of aspiral-shaped μ-reconcentrator with dimensions of 10cm x 300μm x 300μm, followed by aμ-hotplate sensor matrix. Theμ-preconcentrator was fabricated on a silicon wafer by means of DRIE and anodic bonding techniques. To obtain theconcentration factor of the fabricated devices, a GC/MS: Shimadzu-QP5000 equipment was used. The results obtainedshowed excellent repeatability and preconcentration factors up to 286. A considerable improvement (1500%) in thesensor responses was achieved with Pd doped SnO_2sensors. The small size of the manufactured devices enables theirincorporation in an integrated GC/MS gas sensor system.