The Main Points of the Microelectromechanical Systems Development

机译：微机电系统开发的要点

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In this paper the basic MEMS structure and main development problems are considered. It's also accented on the design of the most used types of MEMS parts and the most popular MEMS applications are mentioned. In this paper the main points and tasks of the microelectromechanical systems development are described.

机译：在本文中，考虑了基本MEMS结构和主要发展问题。它还会对最多使用类型的MEMS部件的设计进行重点，并且提到最受欢迎的MEMS应用程序。在本文中，描述了微机电系统开发的主要观点和任务。

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《International Confernece on Young Scientists》|2008年||共2页
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作者
Hirnyak Yuriy;
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中图分类 T-53;
关键词
MEMS development; Main tasks; Structure;

机译：MEMS发展;主要任务;结构;

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1. Developments in Microelectromechanical Systems (MEMS): A Manufacturing Perspective [J] . Srinivas A. Tadigadapa, Nader Najafi Journal of manufacturing science and engineering: Transactions of the ASME . 2003,第4期

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4. The Main Points of the Microelectromechanical Systems Development [C] . Hirnyak Yuriy International Confernece on Young Scientists . 2008

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The Main Points of the Microelectromechanical Systems Development

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