Combining Nano-Scale Inert-Gas Ion Microscopy and Secondary Ion Mass Spectrometry

摘要

This contribution reports on the ongoing development of a new instrument that combines a scanning helium/neon ion microscope (FIGURE 1), based on a gaseous field-ion source (GFIS), with a secondary ion mass spectrometer (SIMS). The new instrument approaches the limits of spatial resolution achievable in scanning ion microscopy and SIMS analysis, benefitting nano-scale microscopy, metrology and materials characterization.