Characterization of Cross-Sectional Profile of Resist Pattern Using Grazing-Incidence Small Angle X-Ray Scattering

机译：使用放射性发生小角度X射线散射抗蚀剂图案横截面轮廓的表征

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Our newly-developed x-ray metrology tool, CD-SAXS, has been demonstrated. Cross-sectional profiles of resist patterns were measured by the instrument. The results obtained by the CD-SAXS were consistent with those obtained by cross-sectional SEM observation. CD-SAXS has a capability for measuring cross-sectional profile nondestructively. Our new x-ray method is very effective in CD metrology on mass production lines.

机译：我们的新开发的X射线计量工具CD-SAXS已经证明。通过仪器测量抗蚀剂图案的横截面轮廓。 CD-SAXS获得的结果与通过横截面SEM观察获得的结果一致。 CD-SAX具有无损测量横截面型材的能力。我们的新X射线法在批量生产线上的CD计量中非常有效。

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《International Conference on Frontiers of Characterization and Metrology for Nanoelectronics》|2015年||共3页
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Yoshiyasu Ito; Akifusa Higuchi; Kazuhiko Omote;
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中图分类 TB973-53;
关键词
X-ray metrology; CD-SAXS; GI-SAXS; Resist; Cross-sectional profile;

机译：X射线计量;CD-SAXS;GI-SAXS;抗蚀剂;横截面轮廓;

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专利

1. Visualizing patterned thin films by grazing-incidence small-angle X-ray scattering coupled with computed tomography [J] . Ogawa Hiroki, Nishikawa Yukihiro, Fujiwara Akihiko, Journal of Applied Crystallography . 2015,第6期

机译：通过掠入射小角X射线散射和计算机断层扫描相结合来可视化已图案化的薄膜
2. Structural characterization using the multiple scattering effects in grazing-incidence small-angle X-ray scattering [J] . Lee B, Lo CT, Thiyagarajan P, Journal of Applied Crystallography . 2008,第1期

机译：掠入射小角度X射线散射中使用多重散射效应的结构表征
3. Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering [J] . Siffalovic P, Majkova E, Chitu L, Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 2009,第1期

机译：通过掠入射小角X射线散射表征Mo / Si软X射线多层反射镜
4. Characterization of Cross-Sectional Profile of Resist Pattern Using Grazing-Incidence Small Angle X-Ray Scattering [C] . Yoshiyasu Ito, Akifusa Higuchi, Kazuhiko Omote International Conference on Frontiers of Characterization and Metrology for Nanoelectronics . 2015

机译：使用放射性发生小角度X射线散射抗蚀剂图案横截面轮廓的表征
5. Measuring helium nano-bubble formation in tungsten with grazing-incidence small angle X-ray scattering [D] . Thompson, Matt A. T. 2017

机译：测量钨纳米泡沫形成，采用放牧发生小角度X射线散射
6. A customizable software for fast reduction and analysis of large X-ray scattering data sets: applications of the new DPDAK package to small-angle X-ray scattering and grazing-incidence small-angle X-ray scattering [O] . Gunthard Benecke, Wolfgang Wagermaier, Chenghao Li, -1

机译：可定制的软件用于快速减少和分析大型X射线散射数据集：新的DPDAK软件包在小角度X射线散射和掠入射小角度X射线散射中的应用
7. Small-Angle X-Ray Scattering (SAXS), Ultra-Small Angle X-Ray Scattering (USAXS), Fluctuation X-Ray Scattering (FXS), Wide-Angle X-Ray Scattering (WAXS), Grazing-Incidence Small-Angle X-Ray Scattering (GISAXS), Grazing-Incidence Wide-Angle X-Ray Scattering (GIWAXS), Small-Angle Neutron Scattering (SANS), Grazing-Incidence Small-Angle Neutron Scattering (GISANS), X-Ray Diffraction (XRD), Powder X-Ray Diffraction (PXRD), Wide-Angle X-Ray Diffraction (WAXD), Grazing- Incidence X-Ray Diffraction (GIXD) and Energy-Dispersive X-Ray Diffraction (EDXRD) Comparative Study on Malignant and Benign Human Cancer Cells and Tissues under Synchrotron Radiation [O] . Alireza Heidari 2017

机译：小角X射线散射（萨克斯），超小角X射线散射（USAX），波动X射线散射（FXS），广角X射线散射（蜡），放牧发生小角度x - 射线散射（吉即），放牧入射广角X射线散射（Giwaxs），小角度中子散射（SAN），放牧发生小角度中子散射（Gisans），X射线衍射（XRD），粉末X射线衍射（PXRD），广角X射线衍射（WAXD），放牧发病X射线衍射（GIXD）和能量分散X射线衍射（EDXRD）对恶性和良性人体癌细胞的比较研究和同步辐射下的组织

Characterization of Cross-Sectional Profile of Resist Pattern Using Grazing-Incidence Small Angle X-Ray Scattering

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