Effective extreme ultraviolet radiation source based on laser-produced plasma in supersonic xenon jet.

摘要

Development of highly effective debris free EUV (extreme ultraviolet) radiation source is an actual problem today. Experimental results on EUV output from the source based on laser-produced plasma in supersonic Xe jet have been obtained. The conversion efficiency is 0.08percent at a wavelength of 13.5 nm ((DELTA)(lambda) velence 0.35 nm, 2pi sterrad). The methods of optimization of gas-jet converter have been determined. Measurements of EUV radiation energy dependence on the laser energy and the target material (solid-state Cu, Mo, W, Ta and supersonic Xe jet) have been made. The conversion efficiency of laser-produced plasma (CELPP) has been determined and the experimental values have been obtained for different materials of the target.