A MEMS-based Organic Deformable Mirror with Tunable Focal Length

摘要

In this paper, we present a deformable mirror with circular membrane combined with single transparent electrode which can used as concave or convex mirrors. The membrane is made by organic material to achieve large deformation is actuated by electrostatic force. The mirror's focal length is adjustable by tuning the applied voltage. The beam diameter can be shrunk to 1/3 of original diameter when the focal length is adjusted to 87mm. The fabrication process, mirror's tunable range, and experiment result will be discussed in this article.