Optical image analysis of the novel ultra-lightweight and high-resolution MEMS X-ray optics

摘要

We invented novel ultra-lightweight and high-resolution MEMS (Micro Electro Mechanical Systems) X-ray optics for space X-ray telescopes. As a first step of R&D, we conducted optical image analysis of a spherically-shaped test optic with a radius of curvature of 1000mm. Focusing of the parallel light was verified with our optic for the first time.