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Langmuir probe diagnostics of plasma generated by means of pulsed Nd:YAG laser interaction with Si-based targets

机译:Langmuir通过脉冲Nd产生的等离子体探测诊断:与基于Si的目标的YAG激光相互作用

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摘要

Investigations of laser ablation plume aimed at applications for the SiO nano-film deposition are reported. The plasma formation and propagation through experimental chamber was investigated by means of Langmuir probe. The effects related to plume splitting and acceleration are discussed.
机译:报道了激光烧蚀羽毛的研究旨在用于SiO纳米膜沉积的应用。通过Langmuir探针研究了通过实验室的等离子体形成和传播。讨论了与羽流分裂和加速相关的效果。

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