NOVEL STAGE WITH VOICE COIL MOTOR FOR LASER BEAM DIRECT WRITING

摘要

Laser beam direct writing (LBDW) technology has potential to be applied to semiconductor and FPD (flat panel display) industry. In order to transfer and then wirte micro and nano pattern for semiconductor and FPD device such as PDP and LCD, the equipments should be able to carry large sized work-piece and have high productivity and high accuracy. We proposed a novel XY-stage mechanism which is compact and fast with long range of motion. The stage actuated by four voice coil motors (VCMs) which are composed of coil windings, yoke and magnets. Two VCM's are for X-directional motion and the other two VCM's are for Y-direction. The stage moves over 20 mm X 20 mm in XY-range with maximum acceleration of 1.2g and bandwidth of 20 Hz. Magnetics of the VCM is analyzed and designed with using a finite element method. The laser writing system with the stage is applied to position work-piece or laser head.