AN ELASTIC BEARING FOR RECTILINEAR TRANSLATIONS AND ITS APPLICATION WITHIN A MICRO METROLOGY INSTRUMENT

摘要

A lumped spring-mass model of a rectilinear flexural bearing has been developed for static and modal analyses in one direction. The exactness of the model has been confirmed by FEA and experimental studies of two prototyped bearings from a metrology instrument measuring the roundness of micro components. Moreover cross-coupling effects of two combined orthogonal loads have been demonstrated by FEA. These effects alter the stiffness of an elastic bearing and hence its accuracy. Quantifying them is important when predicting the accuracy of an instrument based on elastic bearings.