In next-generation semiconductor equipment positioning performance in the order of one nanometer and better will be required. Achieving such performance creates novel challenges for the sensor systems and disturbance levels in equipment. Over the past 25 years a number of system concepts have been developed. Most recent breakthrough has been obtained with the rigorous separation of metrology and functional parts from the moving elements. Bringing the low-frequency acceleration levels down from about 10 mm/s^2 to less than 0.1 mm/s^2. Enabling this is the class of "Floating Carpet" 6DOF motion concepts. The Delft University has demonstrated such a device and achieved sub-nanometer performance.
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机译：在下一代半导体设备中，将需要一个纳米的定位性能，并且需要更好。实现这种性能为设备中的传感器系统和干扰水平创造了新的挑战。在过去的25年中，已经开发了许多系统概念。最近的突破是从移动元件中的严格分离和功能部件的严格分离。将低频加速度降低到大约10 mm / s ^ 2至小于0.1 mm / s ^ 2。使这是“浮地毯”6dof运动概念的类别。代尔福特大学已经证明了这样的设备并实现了亚纳米的性能。
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