Applications of Focused X-Ray Laser at 21 nm in High-Energy Density Experiments

摘要

We report on the generation of a focused X-ray laser beam with high energy density. The output of the 21.2 nm X-ray laser at PALS containing energy of 4 mJ was focused down to 20 x 40 um2 elliptical spot Samples of various solids were irradiated by the focused X-ray laser beam at various fluences. Feasibility of single-shot projection ablation lithography has been explored. First measurement of the XUV opacity of volumetrically heated thin foil by the focused X-ray laser has been performed.