Ceramic-based Polymer Composite Film for Integrated Substrates Fabricated by Aerosol Deposition Method

摘要

Employing the aerosol deposition method (ADM), ceramic-based polymer composite thick films for integrated substrates were successfully fabricated on Cu substrates at room temperature. The composite thick films were grown by simultaneously impacting the mixture of ceramic and polymer powders on substrates. As a matrix material, Al_2O_3 ceramic powder was used and appropriate polymer powder for the AD process were examined. And, the optimum deposition conditions for the composite films were investigated by varying the ratio of contents of ceramic and polymer powder, starting powder sizes, and types of polymer powders. In this study, it was found that polyimide powder has appropriate characteristics for the AD process and clarified that the hardness of polymer is very important factor for fabricating ceramic-based polymer composite thick films.