Fabrication of Moving Parts within an LTCC Structure

摘要

The variety and complexity of systems built using LTCC has increased greatly since its introduction. Originally intended as a platform for packaging electronic components, LTCC has been used in the development of micro-sensors, micro-systems and micro-propulsion devices. In the interest of exploring LTCC's flexibility as a building material, a process was developed for including moving parts within an LTCC structure. The moving components successfully included within an LTCC structure include gears, pushrods, and fluid propelled rotors. Shafts made of mono-crystalline sapphire have also been included into the structures in conjunction with these components. These shafts have been used to locate, power, and transmit the movement of the encased parts. The ability to embed movable features makes the design of complex systems such as compressors, turbines, and other micro-fluidic devices possible. In addition, the integration of these techniques with the electronic capabilities of LTCC provides a method to develop generators and other MEMS applications.