Characterization of Lithographically Structured PZT Thick Film Structures

摘要

A novel thick film process using lithography was presented earlier. This process overcomes the restrictions of conventional thick-films in terms of alignment, feature sizes and reproducibility. To successfully design micro electro-mechanical systems (MEMS) using this process the mechanical, electrical and piezoelectric properties are characterized and compared to conventionally produced ceramic plates The standard measurements for piezoelectric constants are not applicable for thick films, as the film properties can never be measured independently from the substrate. A model involving analytical theory and simulation is developed and the constants are derived thereby.