Experimental Investigation on Surface Microscopic Characteristics in Electrochemical Mechanical Finishing

摘要

The mechanism of electrochemical mechanical finishing (ECMF) process was investigated. The experimental system was developed and electrochemical process parameters such as operating voltage, electrolyte component and concentration, electrolyte temperature, electrode gap and current density were evaluated. The important surface microscopic characteristics, such as height and spacing characteristics of surface roughness, surface waviness and microscopic structure before and after ECMF were compared and analyzed in detail. The experiment results indicate that ECMF is an effective machining method to reduce surface roughness and promote surface quality and shape accuracy.