Surface Reactions of Metal Catalysts in Ethanol-CVD Ambient at Low-Pressure Studied by in-situ Photoelectron Spectroscopy

摘要

We succeeded in growing carbon nanotubes in a photoelectron spectroscopy analysis system using thermal chemical vapor deposition and analyzed the chemical states of the Co catalysts by in-situ X-ray photoelectron spectroscopy before and after the growth. We found that almost all of the Co particles are metallic after the growth in both cases; Co particles are formed from a Co oxide thin film and a metallic Co thin film. This shows that the metallic state is stable for Co under low-pressure ethanol ambient in our growth condition for carbon nanotubes.