Study of Infrared AR and Protection Coating On MgF_2

摘要

Infrared AR and protective complex film is coated on the MgF_2 substrate associated with ion source aid technology. The complex film is composed of multilayer dielectric film and super hard protective film. The function of dielectric film is antireflection while the super hard film is used as protective layer. Through analyzing the stress match, bond strength and binding force which exist between film and substrate as well as among layers, optimum materials are selected. Efficient antireflective and protective function are realized when the best technological parameter is chosen. The result of the experiment indicates that the reflection of single facet is reduced from 2.5% to 1.5%. Moist and thermal test as well as high and low temperature test have passed. The synthetic result of the experiment is also provided.