ta-C protective film for infrared optical lens protection and its coating method

摘要

Disclosed is a ta-C protective film doped with 4 at% to 20 at% Si as a ta-C (tetrahedral amorphous carbon) protective film for protecting an infrared optical lens. The ta-C protective film provided in one aspect of the present invention has improved hardness and friction coefficient, can be formed as a thick thick film by reducing stress, and has the effect of improving infrared transmittance.