Motion systems for nanometer precision have many critical components that must work well together for nanometer precision and when you place these components in a UHV chamber these components need to be carefully re-engineered to assure heat dissipation, outgassing and precision motion. We have not discussed in this paper the necessity of having a capable motion controller but this is the most important key to nanometer precision. Closing the loop between the motors and encoders with high speed interpolation is a must for nanometer precision.
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