Development of a high precision positioning system (PS) for a large chamber scanning electron microscope (SEM)

摘要

A conventional SEM is equipped with a shoebox-sized vacuum chamber with a multi-axis sample holder inside. The holder is used to position the sample relatively to the electron beam. Due to the design principle the maximum weight of the sample is 1 kg and the maximum diameter is 300mm. In order to overcome the limitations of the sample dimensions, a Large Chamber SEM is developed (Fig. 1) in a completely new approach.