High Coupling Efficiency and High Yield Coaxial-Type Laser Module Packages Using On-Line Monitoring System

摘要

The laser-welded coaxial-type laser module packages using an on-line monitoring system (OLMS) is presented. The OLMS is integrated with an ultra-high precision laser displacement meter (LDM) and a laser welding system that enables to quantitatively on-line process the successive postweld shift (PWS) measurements by the LDM and corrections by the laser welding during multiple welding compensations in laser-welded laser module packages. The results show that the high-yield laser module packages with high coupling efficiency of 86～97 % are obtained.