The magnetic anisotropy properties of (Ga, Mn)As epilayers are dependent on strain, thickness, substrates orientation, measurement temperature and shape [1-3]. Systematic study magnetic anisotropy is important owing to they will strongly influence its application of spintronic devices. The effect of low-temperature annealing on the lattice constant and magnetic properties of ternary (Ga, Mn)As grown on GaAs substrates has been intensely studied [4,5].
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