Cantilevered actuators were studied using principles of piezoelectric effect, thermal expansion, and magnetostoriction. In these principles, the magnetostirictive effect is important because it enables to work the cantilever wirelessly. In previous works, crystalline or amorphous TbFe and SmFe were studied because they had large magnetostriction constant. However they required large field to work, therefore they were not suitable for applications for microsystems.
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