A New Electron Beam-addressed Reflective Spatial Light Modulator and Projection System for HWIL Scene Generation

摘要

We successfully fabricated two lots of micromirror devices. Each device consisted of a fused silica substrate, a substrate grid layer, a micromirror array layer, a dielectric membrane layer, and a top electrode layer (patterned with collector grid and vent hole only). Each micromirror array contained 1920x1536 mirrors, corresponding to resolution of 1920x1536. The process approach was repeatable, and reliable. Optical microscopy showed that the micromirrors were suspended above the glass panel by mirror post regions. The membrane was suspended above the substrate panel and above the array of micromirrors by membrane post regions. Micromirrors were flat and clean.