FORMATION AND STRUCTURE CONTROL OF SINGLE-WALLED CRBON NANOTUBS USING PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

摘要

We report a successful SWNT formation using plasma-enhanced chemical vapor deposition (PECVD) method. To the best of our knowledge it is the first report concerning the SWNT formation by PECVD. An appropriate mixture ratio of source gasses under the plasma discharge enables SWNT synthesis temperature to be lowered below 550 °C. Furthermore, it is also achieved to control vertical alignment of individual SWNT by restraining the plasma treatment time to very short time.