Linearity Improvement of Lateral Effect Position Sensitive Devices

摘要

In this paper, a linearity index is proposed to assess the performance of the position measurement of using position sensitive devices (PSDs). Using the index, a set of position measurement formulae is proposed for PSD with tetra-lateral structures. Compared to the conventional results, the proposed measurement formulae have improved the area with distortion less than 1% from the currently best result of 13% to 25%. Simulation results are reported to verify the theoretical analysis.