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Environmentally Friendly, High Thermal Resistant and Low CTE Substrate Material for Semiconductor Packaging

机译:用于半导体封装的环保,高热阻和低CTE基板材料

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摘要

Semiconductor packaging technology has been moving toward much more miniaturization, lighter weight and higher density. Flip Chip packaging is therefore becoming the key technology for next generation devices. The technology has been requiring much finer interconnection between the semiconductor chip and the package substrate, much narrower circuit width on the substrate and a much smaller through-hole diameter. To meet these demands a novel type of substrate material, "LaZ", for semiconductor package has been developed. Much more focus was placed on the thermal expansion at the thickness direction on the substrate, because lower thermal expansion was expected to lead to higher reliability of the substrate. In this paper the reason why higher reliability is accomplished by the use of "LaZ" is demonstrated, and other features of this material, such as environmental friendship, flame retardance and thermal resistance are also described.
机译:半导体包装技术一直朝着更小型化,重量轻,更高的密度移动。因此,倒装芯片包装成为下一代设备的关键技术。该技术一直需要在半导体芯片和封装基板之间更精细地互连,基板上的电路宽度较窄,并且较小的通孔直径。为了满足这些要求,已经开发了一种新型的基板材料,“Laz”,用于半导体封装。将更高的焦点放置在基板上的厚度方向上的热膨胀上,因为预期较低的热膨胀导致基板的可靠性更高。在本文中,通过使用“Laz”来实现更高可靠性的原因,并且还描述了这种材料的其他特征,例如环境友好,阻燃和热阻。

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